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ASTM-F1513:2003 Edition

$35.75

F1513-99(2003) Standard Specification for Pure Aluminum (Unalloyed) Source Material for Electronic Thin Film Applications

Published By Publication Date Number of Pages
ASTM 2003 2
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1.1 This specification covers pure aluminum metal (unalloyed) for use in evaporation sources and sputtering targets. This material is intended as a raw material for electronic applications. The material is used as-supplied in some cases (for example, as e-beam evaporation sources). In other instances it may be remelted, alloyed, cast and processed by the purchaser to make finished products (for example, sputtering targets).

1.2 This specification sets purity grade levels, physical attributes, analytical methods, and packaging.

1.3 The values stated in SI units are to be regarded as the standard. The values given in parentheses are for information only.

PDF Catalog

PDF Pages PDF Title
1 Scope
Referenced Documents
Terminology
Classification
Ordering Information
Impurities
TABLE 1
TABLE 2
2 Grain Size
Dimensions
Workmanship, Finish, and Appearance
Sampling
Analytical Methods
Certification
Packaging and Package Marking
Keywords
ASTM-F1513
$35.75