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ASTM-F1527:2000 Edition

ASTM-F1527:2000 Edition

$44.96

F1527-00 Standard Guide for Application of Silicon Standard Reference Materials and Reference Wafers for Calibration and Control of Instruments for Measuring Resistivity of Silicon

Published By Publication Date Number of Pages
ASTM 2000 15
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ASTM F1527-00

Historical Standard: Standard Guide for Application of Silicon Standard Reference Materials and Reference Wafers for Calibration and Control of Instruments for Measuring Resistivity of Silicon

ASTM F1527

Scope

1.1 This guide covers the application of Standard Reference Materials (SRMs ) for resistivity measurements on silicon wafers. Specifically, this guide covers the use of these SRMs for preparing resistivity reference wafers and for ensuring the quality of the instrumentation used for preparing them.

1.2 This guide has not been evaluated for application to electronic materials other than silicon.

1.3 The guide covers the selection of materials for resistivity reference wafers, procedures for preparing and calibrating resistivity reference wafers, and use of resistivity reference wafers in qualifying, calibrating, and controlling various types of resistivity instrumentation.

1.4 The guide provides criteria for selection of instruments for determining the resistivity of silicon resistivity reference materials, procedures for maintaining such instruments in statistical quality control, and training requirements for operators engaged in making and using resistivity reference wafers.

1.5 Appendixes are included that cover (1) suggested control charting procedures for organizations that do not already have such procedures in place, and (2) errors in resistivity determination that result from uncertainties in wafer diameter, wafer thickness, and probe-tip spacing.

1.6 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.

Keywords

Calibration-semiconductor analysis instrumentation; Control chart; Eddy current gage; Four-point probe method; Mercury probe; Probe methods-four-point probe; Probe methods-spreading resistance probe; Reference materials (RM); Resistance (electrical)-semiconductors; Resistivity reference wafer; Sheet resistance; Silicon semiconductors; Silicon semiconductors-slices/wafers; SPC; Spreading resistance probe; Standard reference materials (SRM); silicon standard reference materials (SRM)/reference wafers, for; calibration/control of instruments for measuring resistivity of silicon

ICS Code

ICS Number Code 29.045 (Semiconducting materials)

DOI: 10.1520/F1527-00

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