ASTM-F66 1990
$40.63
F66-84(1990) Test Methods for Testing Photoresists Used in Microelectronic Fabrication (Withdrawn 1996)
Published By | Publication Date | Number of Pages |
ASTM | 1990 | 9 |
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ASTM F66-84-Reapproved1990
Withdrawn Standard: Test Methods for Testing Photoresists Used in Microelectronic Fabrication (Withdrawn 1996)
ASTM F66
Scope
Keywords
ICS Code
ICS Number Code 87.040 (Paints and varnishes)
DOI:
Standard Title | F66-84(1990) Test Methods for Testing Photoresists Used in Microelectronic Fabrication (Withdrawn 1996) |
---|---|
Published Code | ASTM |
Publication Date | 1990 |
Pages Count | 9 |
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