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BS EN 62047-5:2011:2013 Edition

BS EN 62047-5:2011:2013 Edition

$167.15

Semiconductor devices. Micro-electromechanical devices – RF MEMS switches

Published By Publication Date Number of Pages
BSI 2013 38
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This part of IEC 62047 describes terminology, definition, symbols, test methods that can be used to evaluate and determine the essential ratings and characteristic parameters of RF MEMS switches. The statements made in this standardization are also applicable to RF (Radio Frequency) MEMS (Micro-Electro-Mechanical Systems) switches with various structures, contacts (d.c. contact and capacitive contact), configurations (series and shunt), switching networks (SPST, SPDT, DPDT, etc.), and actuation mechanism such as electrostatic, electro-thermal, electromagnetic, piezoelectric, etc. The RF MEMS switches are promising devices in advanced mobile phones with multi-band/mode operation, smart radar systems, reconfigurable RF devices and systems, SDR (Software Defined Radio) phones, test equipments, tunable devices and systems, satellite, etc.

PDF Catalog

PDF Pages PDF Title
6 English

CONTENTS
8 1 Scope
2 Normative references
3 Terms and definitions
9 3.1 Switching operation
3.2 Switching configuration
3.3 Actuating mechanism
10 3.4 Switching network configurations
3.5 Reliability (performance)
11 3.6 Electrical characteristics
12 4 Essential ratings and characteristics
4.1 Identification and types
13 4.2 Application and specification description
4.3 Limiting values and operating conditions
4.4 DC and RF characteristics
Figures

Figure 1 ā€“ Terminals of RF MEMS switch
14 4.5 Mechanical and environmental characteristics
4.6 Additional information
5 Measuring methods
5.1 General
5.2 DC characteristics
15 Figure 2 ā€“ Circuit diagram for measuring d.c. actuation voltage and RF characteristics of RF MEMS switches
16 Figure 3 ā€“ Circuit diagram for measuring impedancebetween the input and output ports
19 5.3 RF characteristics
20 Figure 4 ā€“ Circuit diagram for measuring RF characteristics between the inputand output ports using a network analyzer
23 5.4 Switching characteristics
24 6 Reliability (performance)
6.1 General
6.2 Life time cycles
Figure 5 ā€“ Circuit block diagram of a test setupto evaluate life time of RF MEMS switch
26 6.3 Temperature cycles
6.4 High temperature and high humidity testing
Figure 6 ā€“ Circuit block diagram of a test setup for power handling capability of RF MEMS switch
27 6.5 Shock testing
6.6 Vibration testing
6.7 Electrostatic discharge (ESD) sensitivity testing
28 Annex A (informative)
General description of RF MEMS Switches
Tables

Table A.1 ā€“ Comparison of semiconductor and RF MEMS switches
29 Annex B (informative)
Geometry of RF MEMS switches
Figure B.1 ā€“ RF MEMS series d.c. contact switch with two contact areas.
Figure B.2 ā€“ RF MEMS series d.c. contact switch with one contact area
30 Figure B.3 ā€“ RF MEMS shunt d.c. contact switch
Figure B.4 ā€“ RF MEMS series capacitive type switch with one contact area
31 Figure B.5 ā€“ RF MEMS shunt capacitive type switch
Table B.1 ā€“ Comparison of RF MEMS switches with different actuation mechanism
32 Annex C (informative)
Packaging of RF MEMS switches
33 Annex D (informative)
Failure mechanism of RF MEMS switches
Table D.1 ā€“ Comparison of failure mechanism of RF MEMS switches
34 Annex E (informative)
Applications of RF MEMS switches
36 Annex F (informative)
Measurement procedure of RF MEMS switches
Figure F.1 ā€“ Measurement procedure of RF MEMS switches

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BS EN 62047-5:2011
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