BS EN ISO 14644-10:2013
$167.15
Cleanrooms and associated controlled environments – Part 10: Classification of surface cleanliness by chemical concentration
| Published By | Publication Date | Number of Pages |
| BSI | 2013 | 40 |
This part of ISO 14644 defines the classification system for cleanliness of surfaces in cleanrooms with regard to the presence of chemical compounds or elements (including molecules, ions, atoms and particles). This part of ISO 14644 is applicable to all solid surfaces in cleanrooms and associated controlled environments such as walls, ceilings, floors, working environment, tools, equipment and devices.
NOTE 1 For the purpose of this part of ISO 14644, consideration is only given to the chemical characteristics of a particle. The physical properties of the particle are not considered and this part of ISO 14644 does not cover the interaction between the contamination and the surface.
NOTE 2 This part of ISO 14644 does not include the contamination generation process and any time-dependent influences (deposition, sedimentation, ageing, etc.) or process-dependent activities such as transportation and handling. Neither does it include guidance on statistical quality control techniques to ensure compliance.
PDF Catalog
| PDF Pages | PDF Title |
|---|---|
| 6 | Foreword |
| 7 | Section sec_1 Section sec_2 Section sec_3 1 Scope 2 Normative references 3 Terms and definitions |
| 8 | Section sec_4 Section sec_4.1 Section sec_4.2 4 Classification 4.1 Principles for establishing classification of clean surfaces in cleanrooms and controlled environments 4.2 Classification for surface cleanliness by chemical concentration |
| 9 | Table tab_1 |
| 10 | Table tab_a Figure fig_1 Section sec_4.3 Section sec_4.4 4.3 ISO-SCC designation 4.4 Converter for substances into surface atomic concentration |
| 11 | Section sec_5 Section sec_5.1 5 Measuring and monitoring the cleanliness of surfaces for chemical contamination and demonstration of compliance 5.1 Criteria for good cleanliness assessment |
| 12 | Section sec_5.2 Section sec_5.2.1 Section sec_5.2.2 Section sec_5.2.3 5.2 Documentation and reporting |
| 14 | Annex sec_A Annex sec_A.1 Annex sec_A.2 Table tab_A.1 Table tab_A.2 Annex A (informative) Conversion between different unit expressions of surface concentration for chemical substances |
| 15 | Table tab_A.3 |
| 16 | Table tab_A.4 |
| 17 | Table tab_e Figure fig_A.1 |
| 18 | Table tab_f Figure fig_A.2 |
| 19 | Table tab_g Figure fig_A.3 |
| 20 | Table tab_h Figure fig_A.4 |
| 21 | Annex sec_B Annex sec_B.1 Annex sec_B.2 Annex B (informative) Parameters influencing testing and interpretation of results |
| 22 | Annex sec_C Annex sec_C.1 Annex sec_C.2 Annex C (informative) Essential considerations for a good cleanliness assessment |
| 23 | Annex sec_D Annex sec_D.1 Annex sec_D.1.1 Annex sec_D.1.2 Figure fig_D.1 Annex sec_D.1.3 Annex D (informative) Methods for testing surface cleanliness by chemical concentration |
| 24 | Table tab_i Figure fig_D.2 |
| 25 | Annex sec_D.2 Annex sec_D.2.1 Annex sec_D.2.2 Annex sec_D.2.3 Annex sec_D.2.3.1 |
| 26 | Annex sec_D.2.3.2 Annex sec_D.2.3.3 Annex sec_D.2.4 Annex sec_D.2.4.1 |
| 27 | Annex sec_D.2.4.2 Annex sec_D.2.5 Annex sec_D.2.6 Annex sec_D.2.7 |
| 28 | Table tab_D.1 |
| 30 | Annex sec_D.2.8 Table tab_D.2 |
| 32 | Annex sec_D.2.9 Figure fig_D.3 |
| 33 | Annex sec_D.2.10 Figure fig_D.4 |
| 34 | Annex sec_E Annex E (informative) Test record documentation |
| 35 | Reference ref_1 Reference ref_2 Reference ref_3 Reference ref_4 Reference ref_5 Reference ref_6 Reference ref_7 Reference ref_8 Reference ref_9 Reference ref_10 Reference ref_11 Reference ref_12 Reference ref_13 Reference ref_14 Reference ref_15 Reference ref_16 Bibliography |
| 36 | Reference ref_17 Reference ref_18 |
