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BS EN ISO 23131:2022:2023 Edition

BS EN ISO 23131:2022:2023 Edition

$142.49

Ellipsometry. Principles

Published By Publication Date Number of Pages
BSI 2023 24
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PDF Catalog

PDF Pages PDF Title
2 undefined
4 European foreword
Endorsement notice
6 Foreword
7 Introduction
9 1 Scope
2 Normative references
3 Terms, definitions, symbols and abbreviated terms
3.1 Terms and definitions
3.2 Symbols and abbreviated terms
10 4 Experimental boundary conditions with respect to the sample
11 5 Experimental boundary conditions with respect to the measurement
12 6 Model-correlated boundary conditions of the simulation
7 Basic models
7.1 General
13 7.2 Bulk material (case 1 of application)
7.3 Transparent single layer (case 2 of application)
7.4 Semi-transparent single layer (case 3 of application)
7.5 Multiple layers and periodic layers (case 4 of application)
7.6 Effective materials (case 5 of application)
8 Raw data
9 Verification of correct adjustment of the device
9.1 Straight line measurement
14 9.2 Simple measurement of angles
9.2.1 Measurement on a known sample, e.g. SiO2/Si, with fitting of the angle of incidence
16 9.2.2 Measurement of the Brewster’s angle of water, of a solvent or of technical glass
17 10 Verification of the device regarding correct calibration
11 Test report
18 Annex A (informative) Mathematical and physical principles of ellipsometry
23 Bibliography

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BS EN ISO 23131:2022
$142.49