BS ISO 13083:2015
$142.49
Surface chemical analysis. Scanning probe microscopy. Standards on the definition and calibration of spatial resolution of electrical scanning probe microscopes (ESPMs) such as SSRM and SCM for 2D-dopant imaging and other purposes
| Published By | Publication Date | Number of Pages |
| BSI | 2015 | 26 |
PDF Catalog
| PDF Pages | PDF Title |
|---|---|
| 6 | Foreword |
| 7 | Introduction |
| 9 | 1 Scope 2 Normative references 3 Terms and definitions 4 Symbols and abbreviated terms |
| 10 | 5 General information 5.1 Background information 5.2 Target 5.2.1 Scanning capacitance microscope 5.2.2 Scanning spreading resistance microscope |
| 11 | 5.3 Measurement method for lateral resolution in SCM and SSRM |
| 13 | 5.4 Key parameters in determining the lateral resolution 6 Measurement of lateral resolution of SCM with the sharp-edge method 6.1 Background information 6.2 Selection of the sample |
| 14 | 6.3 Setting the parameters before the operation of the instrument 6.4 Data collection 6.5 Data analysis 6.5.1 Obtaining the resolution |
| 15 | 6.5.2 Random contributions to the resolution value 6.6 Recording of the parameters |
| 16 | 7 Measurement of lateral resolution of SSRM with the sharp-edge method 7.1 Background information 7.2 Selection of the sample 7.3 Setting the parameters before the operation of the instrument 7.4 Data collection 7.5 Data analysis 7.5.1 Obtaining the resolution |
| 17 | 7.5.2 Random contributions to the resolution value 7.6 Recording of the parameters |
| 18 | Annex A (informative) An example of the measurement of SCM resolution |
| 20 | Annex B (informative) An example of the measurement of SSRM resolution |
| 22 | Bibliography |
