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BS ISO 19749:2021

BS ISO 19749:2021

$215.11

Nanotechnologies. Measurements of particle size and shape distributions by scanning electron microscopy

Published By Publication Date Number of Pages
BSI 2021 80
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This document specifies methods of determining nanoparticle size and shape distributions by acquiring and evaluating scanning electron microscope images and by obtaining and reporting accurate results.

NOTE 1 This document applies to particles with a lower size limit that depends on the required uncertainty and on the suitable performance of the SEM, which is to be proven first -according to the requirements described in this document.

NOTE 2 This document applies also to SEM-based size and shape measurements of larger than nanoscale particles.

PDF Catalog

PDF Pages PDF Title
2 undefined
7 Foreword
8 Introduction
9 1 Scope
2 Normative references
10 3 Terms and definitions
3.1 General terms
12 3.2 Core terms: image analysis
3.3 Core terms: statistical symbols and definitions
14 3.4 Core terms: measurands and descriptors
16 3.5 Core terms: metrology
18 3.6 Core terms: scanning electron microscopy
19 4 General principles
4.1 SEM imaging
20 4.2 SEM image-based particle size measurements
21 4.3 SEM image-based particle shape measurements
5 Sample preparation
5.1 Sample preparation fundamental information
22 5.2 General recommendations
5.3 Ensuring good sampling of powder or dispersion-in-liquid raw materials
5.3.1 Powders
23 5.3.2 Nanoparticle dispersions in liquids
5.4 Ensuring representative dispersion
5.5 Nanoparticle deposition on a substrate
5.5.1 General
24 5.5.2 Nanoparticle deposition on wafers and chips of silicon or other materials
25 5.5.3 Nanoparticle deposition on TEM grids
26 5.6 Number of samples to be prepared
5.7 Number of particles to be measured for particle size determination
27 5.8 Number of particles to be measured for particle shape determination
6 Qualification of the SEM for nanoparticle measurements
7 Image acquisition
7.1 General
31 7.2 Setting suitable image magnification and pixel resolution
32 8 Particle analysis
8.1 Particle analysis fundamental information
33 8.2 Individual particle analysis
8.3 Automated particle analysis
34 8.4 Automated particle analysis procedure example
35 9 Data analysis
9.1 General
9.2 Raw data screening: detecting touching particles, artefacts and contaminants
9.3 Fitting models to data
9.4 Assessment of measurement uncertainty
9.4.1 General
36 9.4.2 Example: Measurement uncertainty for particle size measurements
37 9.4.3 Bivariate analysis
10 Reporting the results
39 Annex A (normative) Qualification of the SEM for nanoparticle measurements
44 Annex B (informative) Cross-sectional titanium dioxide samples preparation
46 Annex C (informative) Case study on well-dispersed 60 nm size silicon dioxide nanoparticles
54 Annex D (informative) Case study on 40 nm size titanium dioxide nanoparticles
63 Annex E (informative) Example for extracting particle size results of SEM-based nanoparticle measurements using ImageJ
65 Annex F (informative) Effects of some image acquisition parameters and thresholding methods on SEM particle size measurements
69 Annex G (informative) Example for reporting results of SEM-based nanoparticle measurements
79 Bibliography

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BS ISO 19749:2021
$215.11