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BS ISO 25498:2018

$189.07

Microbeam analysis. Analytical electron microscopy. Selected area electron diffraction analysis using a transmission electron microscope

Published By Publication Date Number of Pages
BSI 2018 48
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This document specifies the method of selected area electron diffraction (SAED) analysis using a transmission electron microscope (TEM) to analyse thin crystalline specimens. This document applies to test areas of micrometres and sub-micrometres in size. The minimum diameter of the selected area in a specimen which can be analysed by this method is restricted by the spherical aberration coefficient of the objective lens of the microscope and approaches several hundred nanometres for a modern TEM.

When the size of an analysed specimen area is smaller than that restriction, this document can also be used for the analysis procedure. But, because of the effect of spherical aberration, some of the diffraction information in the pattern can be generated from outside of the area defined by the selected area aperture. In such cases, the use of microdiffraction (nano-beam diffraction) or convergent beam electron diffraction, where available, might be preferred.

This document is applicable to the acquisition of SAED patterns from crystalline specimens, indexing the patterns and calibration of the diffraction constant.

PDF Catalog

PDF Pages PDF Title
2 undefined
6 Foreword
8 Introduction
9 1 Scope
2 Normative references
3 Terms and definitions
11 4 Principle
4.1 General
4.2 Spot diffraction pattern
14 4.3 Kikuchi pattern
15 4.4 Polycrystalline specimen
5 Reference materials
16 6 Equipment
7 Specimens
8 Experimental procedure
8.1 Instrument preparation
17 8.2 Procedure for acquirement of selected area electron diffraction patterns
20 8.3 Determination of diffraction constant, Lλ
21 9 Measurement and solution of the SAED patterns
9.1 Selection of the basic parallelogram
23 9.2 Indexing diffraction spots
24 10 180° ambiguity
11 Uncertainty estimation
11.1 Factors affecting accuracy
25 11.2 Calibration with a reference material
26 Annex A (informative) Interplanar spacing
27 Annex B (informative) Spot diffraction patterns of single crystals for BCC, FCC and HCP structure[7]
46 Bibliography
BS ISO 25498:2018
$189.07