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BSI 23/30442762 DC 2023

BSI 23/30442762 DC 2023

$13.70

BS ISO 8181. Atomic Layer Deposition. Terminology

Published By Publication Date Number of Pages
BSI 2023 18
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PDF Catalog

PDF Pages PDF Title
1 30442762-NC.pdf
3 ISO_DIS 8181 ed.1 – id.82998 Enquiry PDF (en) (1).pdf
6 Foreword
7 Introduction
9 1 Scope
2 Normative references
3 Terms and definitions
10 4 Terms – Atomic layer deposition
4.1 General terms
11 4.2 Film growth of atomic layer deposition
12 4.3 Classification of atomic layer deposition
15 Annex€A (informative) Example of Schematic diagram for time separated ALD and spatial ALD
17 Bibliography
18 Index

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BSI 23/30442762 DC 2023
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