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BSI PD CEN ISO/TS 80004-8:2020

BSI PD CEN ISO/TS 80004-8:2020

$167.15

Nanotechnologies. Vocabulary – Nanomanufacturing processes

Published By Publication Date Number of Pages
BSI 2020 38
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This document defines terms related to nanomanufacturing processes in the field of nanotechnologies.

All the process terms in this document are relevant to nanomanufacturing, however, many of the listed processes are not exclusively relevant to the nanoscale. Terms that are not exclusive are noted within the definitions. Depending on controllable conditions, such processes can result in material features at the nanoscale or, alternatively, at larger scales.

There are many other terms that name tools, components, materials, systems control methods or metrology methods associated with nanomanufacturing that are beyond the scope of this document.

Terms and definitions from other parts of the ISO/TS 80004 series are reproduced in Clause 3 for context and better understanding.

PDF Catalog

PDF Pages PDF Title
2 undefined
4 European foreword
Endorsement notice
6 Foreword
7 Introduction
9 1 Scope
2 Normative references
3 Terms and definitions
11 4 Terms related to general aspects
12 5 Terms related to directed assembly
13 6 Terms related to self-assembly processes
14 7 Terms related to synthesis
7.1 Gas process phase — Physical methods
15 7.2 Gas process phase — Chemical methods
7.2.1 Flame synthesis processes
16 7.2.2 Other terms
7.3 Liquid process phase — Physical methods
17 7.4 Liquid process phase — Chemical methods
18 7.5 Solid process phase — Physical methods
20 7.6 Solid process phase — Chemical methods
8 Terms related to fabrication
8.1 Nanopatterning lithography
24 8.2 Deposition processes
26 8.3 Etching processes
29 8.4 Printing and coating
30 Annex A (informative) Identification of output resulting from defined synthesis processes
33 Bibliography
34 Index

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BSI PD CEN ISO/TS 80004-8:2020
$167.15