BSI PD IEC TS 62607-5-3:2020
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Nanomanufacturing. Key control characteristics – Thin-film organic/nano electronic devices. Measurements of charge carrier concentration
Published By | Publication Date | Number of Pages |
BSI | 2020 | 24 |
This part of IEC TS 62607, which is a Technical Specification, specifies sample structures for evaluating a wide range of charge carrier concentration in organic/nano materials. This specification is provided for both capacitance-voltage (C-V) measurements in metal/insulator/semiconductor stacking structures and Hall-effect measurements with the van der Pauw configuration. Criteria for choosing measurement methods of charge carrier concentration in organic semiconductor layers are also given in this document.
PDF Catalog
PDF Pages | PDF Title |
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2 | undefined |
4 | CONTENTS |
5 | FOREWORD |
7 | INTRODUCTION |
8 | 1 Scope 2 Normative references 3 Terms and definitions 4 Sample structures 4.1 Metal/insulator/semiconductor (MIS) structure |
9 | 4.2 Thin-film specimens with the van der Pauw configuration Figures Figure 1 – Typical metal/insulator/semiconductor (MIS) structures Figure 2 – An organic MIS structure favourable for capacitance-voltage measurements |
10 | 5 Criteria for choosing a method for measuring carrier concentration in organic semiconductor layers 6 Appropriate data formats Figure 3 – Sample structures for Hall-effect measurementwith the van der Pauw configuration |
11 | Table 1 – Possible data format to be given together withcarrier concentrations obtained with capacitance-voltage measurements Table 2 – Possible data format to be given together withcarrier concentrations obtained with the Hall-effect measurements |
12 | Annex A (informative)Case study of carrier concentration measurements of organic materials A.1 Procedure of capacitance-voltage (C-V) measurement Figure A.1 – Equivalent circuit model for capacitance-voltagemeasurement with MIS structure |
13 | A.2 Capacitance-voltage measurement for unoptimized pentacene MIS structures Figure A.2 – Typical capacitance-voltage curves observedfor MIS structures with organic semiconductor films |
14 | Figure A.3 – Capacitance-voltage curves obtainedfor the MIS structure with 70-nm-thick-pentacene film |
15 | A.3 Influences of semiconductor layer thickness and electrode contact conditions on C-V measurements |
16 | A.4 Capacitance-voltage measurement for a pentacene MIS structure with an ultrathin insulator |
18 | Figure A.5 – Capacitance-voltage curves obtained for a pentaceneMIS structure with an ultrathin SAM-modified AlOx insulator |
19 | A.5 Procedure of Hall-effect measurement |
20 | A.6 Hall-effect measurement for organic semiconductor single-crystalline layers |
21 | Figure A.6 – Hall-effect measurement results for rubrenesingle-crystalline layer doped with ferric chloride |
22 | Bibliography |