VDI 2083 Part 13.2:2009 Edition
$39.00
Cleanroom technology – Quality, production and distribution of ultrapure water – Microelectronics and other technical applications
| Published By | Publication Date | Number of Pages |
| DIN | 2009-01 | 52 |
| Published Code | DIN |
|---|---|
| Published By | Deutsches Institut für Normung |
| Publication Date | 2009-01 |
| Pages Count | 52 |
| Language | Germany |
| Descriptors | Air-conditioning systems, Building services, Chemistry of water, Clean rooms, Clean-room technology, Distribution, Inner atmosphere, Microelectronics, Multilingual, Planning, Production, Quality, Quality assurance, Quality requirements, Superpurity water, Ventilation, Water, Water analysis, Water treatment plants |
| File Size | 1.7 MB |
| ICS Codes | 13.040.35 - Cleanrooms and associated controlled environments |
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