VDI 2083 Part 7:2015 Edition

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Cleanroom technology – Ultrapure media – Quality, supply, distribution

Published By	Publication Date	Number of Pages
DIN	2015-10	76

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Categories: 13.040.35 - Cleanrooms and associated controlled environments, DIN

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Description

The standard deals with the specification of ultrapure media (steam, gases, chemicals) for contamination-controlled processes and with the distribution systems for such media. The standard provides a summary of knowledge regarding the design, construction, operation and monitoring of high purity supply systems, and supports planners, system suppliers and operators in their work. It is intended to supersede and replace VDI 2083 Part 7 and Part 10.

Additional information

Published Code	DIN
Published By	Deutsches Institut für Normung
Publication Date	2015-10
Pages Count	76
Language	Germany
Descriptors	Air, Air purity, Air speed, Categories of purity, Chemicals, Clean rooms, Clean-room technology, Compressed air, Concentration of particles, Definitions, Degree of purity, Distribution, Dust, Gases, Impurities, Inner atmosphere, Liquids, Measuring techniques, Methods for measuring, Particles, Particulate air pollutants, Process, Provision, Pure media, Quality, Supply, Supply systems, Vapours, Work spaces, Working place concentration, Working places, Zones of reach, Operating stations
File Size	1.8 MB
ICS Codes	13.040.35 - Cleanrooms and associated controlled environments

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VDI 2083 Part 7:2015 Edition

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