ISO 14706:2000
$36.40
Surface chemical analysis — Determination of surface elemental contamination on silicon wafers by total-reflection X-ray fluorescence (TXRF) spectroscopy
| Published By | Publication Date | Number of Pages |
| ISO | 2000-12 | 30 |
| Published Code | ISO |
|---|---|
| Published By | International Organization for Standardization |
| Publication Date | 2000-12 |
| Pages Count | 30 |
| Language | English |
| Edition | 1 |
| File Size | 215.0 KB |
| ICS Codes | 71.040.40 - Chemical analysis |
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