IEC 62047-17:2015 specifies the method for performing bulge tests on the free-standing film that is bulged within a window. The specimen is fabricated with micro\/nano structural film materials, including metal, ceramic and polymer films, for MEMS, micromachines and others. The thickness of the film is in the range of 0,1 ? to 10 ?, and the width of the rectangular and square membrane window and the diameter of the circular membrane range from 0,5 mm to 4 mm. The tests are carried out at ambient temperature, by applying a uniformly-distributed pressure to the testing film specimen with bulging window. Elastic modulus and residual stress for the film materials can be determined with this method.<\/p>\n
| PDF Pages<\/th>\n | PDF Title<\/th>\n<\/tr>\n | ||||||
|---|---|---|---|---|---|---|---|
| 6<\/td>\n | English CONTENTS <\/td>\n<\/tr>\n | ||||||
| 8<\/td>\n | FOREWORD <\/td>\n<\/tr>\n | ||||||
| 10<\/td>\n | 1 Scope 2 Normative references 3 Terms, definitions and symbols 3.1 Terms and definitions <\/td>\n<\/tr>\n | ||||||
| 11<\/td>\n | 3.2 Symbols 4 Principle of bulge test Figures Figure 1 \u2013 Typical example of bulge specimen Tables Table 1 \u2013 Symbols and designations of a specimen <\/td>\n<\/tr>\n | ||||||
| 12<\/td>\n | 5 Test apparatus and environment 5.1 General Figure 2 \u2013 Membrane window bulged by pressure Figure 3 \u2013 Typical example of bulge test apparatus <\/td>\n<\/tr>\n | ||||||
| 13<\/td>\n | 5.2 Apparatus 5.2.1 Pressuring device 5.2.2 Bulge (pressure) chamber 5.2.3 Height measurement units <\/td>\n<\/tr>\n | ||||||
| 14<\/td>\n | 5.3 Test environment 6 Specimen 6.1 General 6.2 Shape and dimension of specimen 6.3 Measurement of test piece dimension Figure\u00a04 \u2013 Bulge membrane window shapes <\/td>\n<\/tr>\n | ||||||
| 15<\/td>\n | 7 Test procedure and analysis 7.1 Test procedure <\/td>\n<\/tr>\n | ||||||
| 16<\/td>\n | 7.2 Data analysis Figure 5 \u2013 Example of typical pressure-height curve obtained from bulge test <\/td>\n<\/tr>\n | ||||||
| 17<\/td>\n | 8 Test report <\/td>\n<\/tr>\n | ||||||
| 18<\/td>\n | Annex A (informative) Determination of mechanical properties A.1 General A.2 Determination of mechanical properties using stress-strain curve <\/td>\n<\/tr>\n | ||||||
| 20<\/td>\n | A.3 Determination of mechanical properties using analysis of load-deflection <\/td>\n<\/tr>\n | ||||||
| 21<\/td>\n | Table A.1 \u2013 Examples of various expressions of parameters, C1 and C2(\u03bd), for thin square films Table A.2 \u2013 Examples of various expressions of parameters, C1 and C2(\u03bd), for thin spherical films <\/td>\n<\/tr>\n | ||||||
| 22<\/td>\n | Figure A.1 \u2013 Determination of biaxial modulus in the stress-strain curve obtained from bulge test <\/td>\n<\/tr>\n | ||||||
| 23<\/td>\n | Annex B (informative) Deformation measurement techniques B.1 General B.2 Laser interferometry technique B.3 Capacitance type measurement <\/td>\n<\/tr>\n | ||||||
| 25<\/td>\n | Figure B.1 \u2013 Typical example of laser interferometer configuration <\/td>\n<\/tr>\n | ||||||
| 26<\/td>\n | Figure B.2 \u2013 Typical fringe patterns obtained from laser Michelson interferometry and ESPI system <\/td>\n<\/tr>\n | ||||||
| 27<\/td>\n | Figure B.3 \u2013 Typical example of the measurement system using a photo detector Figure B.4 \u2013 Schematic of capacitance bulge tester <\/td>\n<\/tr>\n | ||||||
| 28<\/td>\n | Figure B.5 \u2013 Typical example of relationshipbetween bulge height and capacitance change <\/td>\n<\/tr>\n | ||||||
| 29<\/td>\n | Annex C (informative) Example of test piece fabrication: MEMS process C.1 Test piece fabrication Figure C.1 \u2013 Example of fabrication procedure for bulge test piece <\/td>\n<\/tr>\n | ||||||
| 30<\/td>\n | C.2 Measurement of shape of specimen <\/td>\n<\/tr>\n | ||||||
| 31<\/td>\n | Bibliography <\/td>\n<\/tr>\n<\/table>\n","protected":false},"excerpt":{"rendered":" Semiconductor devices. Micro-electromechanical devices – Bulge test method for measuring mechanical properties of thin films<\/b><\/p>\n |