{"id":29587,"date":"2024-10-17T03:18:24","date_gmt":"2024-10-17T03:18:24","guid":{"rendered":"https:\/\/pdfstandards.shop\/product\/uncategorized\/astm-f1238\/"},"modified":"2024-10-24T14:12:36","modified_gmt":"2024-10-24T14:12:36","slug":"astm-f1238","status":"publish","type":"product","link":"https:\/\/pdfstandards.shop\/product\/publishers\/astm\/astm-f1238\/","title":{"rendered":"ASTM-F1238"},"content":{"rendered":"

ASTM F1238-95-Reapproved2011<\/h3>\n

Withdrawn Standard: Standard Specification for Refractory Silicide Sputtering Targets for Microelectronic Applications (Withdrawn 2020)<\/h4>\n
\n

ASTM F1238<\/h4>\n

Scope<\/strong><\/p>\n

1.1 This specification covers sputtering targets fabricated from metallic silicides (molybdenum silicide, tantalum silicide, titanium silicide, and tungsten silicide). These targets are referred to as refractory silicide targets, and are intended for use in microelectronic applications.<\/p>\n

1.2 The values stated in SI units are to be regarded as standard. No other units of measurement are included in this standard.<\/p>\n

Keywords<\/strong><\/p>\n

density; microelectronics; molybdenum disilicide; refractory silicides; sputtering; sputtering targets; tantalum disilicide; titanium disilicide; tungsten disilicide; Electrical conductors (semiconductors)–specifications; Electronic materials\/applications–specifications; Metallic silicide; Molybdenum (electronic applications)–specifications; Polycaprolactone (PCL); Refractory silicide targets; Silicides; Tantalum (Ta)\/tantalum alloys–specifications; Targets; Titanium silicide; Tungsten silicide (WSix)<\/p>\n

ICS Code<\/strong><\/p>\n

ICS Number Code 31.100 (Electronic tubes)<\/p>\n

DOI:<\/strong> 10.1520\/F1238-95R11<\/p>\n<\/div>\n

PDF Catalog<\/h4>\n\n\n\n\n
PDF Pages<\/th>\nPDF Title<\/th>\n<\/tr>\n
1<\/td>\nScope
Terminology
Ordering Information
Chemical Composition
Physical Properties <\/td>\n<\/tr>\n
2<\/td>\nDimensions
Workmanship, Finish, and Appearance
Sampling
Analytical Methods
Certification
Product Marking
Packaging
Keywords
TABLE 1
TABLE 2 <\/td>\n<\/tr>\n<\/table>\n","protected":false},"excerpt":{"rendered":"

F1238-95(2011) Standard Specification for Refractory Silicide Sputtering Targets for Microelectronic Applications<\/b><\/p>\n\n\n\n\n
Published By<\/td>\nPublication Date<\/td>\nNumber of Pages<\/td>\n<\/tr>\n
ASTM<\/b><\/a><\/td>\n2011<\/td>\n3<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n","protected":false},"featured_media":29588,"template":"","meta":{"rank_math_lock_modified_date":false,"ep_exclude_from_search":false},"product_cat":[2637],"product_tag":[],"class_list":{"0":"post-29587","1":"product","2":"type-product","3":"status-publish","4":"has-post-thumbnail","6":"product_cat-astm","8":"first","9":"instock","10":"sold-individually","11":"shipping-taxable","12":"purchasable","13":"product-type-simple"},"_links":{"self":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product\/29587","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product"}],"about":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/types\/product"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/media\/29588"}],"wp:attachment":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/media?parent=29587"}],"wp:term":[{"taxonomy":"product_cat","embeddable":true,"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product_cat?post=29587"},{"taxonomy":"product_tag","embeddable":true,"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product_tag?post=29587"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}