{"id":318697,"date":"2024-10-19T22:00:57","date_gmt":"2024-10-19T22:00:57","guid":{"rendered":"https:\/\/pdfstandards.shop\/product\/uncategorized\/bs-iso-222782020\/"},"modified":"2024-10-25T20:18:58","modified_gmt":"2024-10-25T20:18:58","slug":"bs-iso-222782020","status":"publish","type":"product","link":"https:\/\/pdfstandards.shop\/product\/publishers\/bsi\/bs-iso-222782020\/","title":{"rendered":"BS ISO 22278:2020"},"content":{"rendered":"

This document specifies the test method for measuring the crystalline quality of single-crystal thin film (wafer) using the XRD method with parallel X-ray beam. This document is applicable to all of the single-crystal thin film (wafer) as bulk or epitaxial layer structure.<\/p>\n

PDF Catalog<\/h4>\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n
PDF Pages<\/th>\nPDF Title<\/th>\n<\/tr>\n
2<\/td>\nNational foreword <\/td>\n<\/tr>\n
6<\/td>\nForeword <\/td>\n<\/tr>\n
7<\/td>\nIntroduction <\/td>\n<\/tr>\n
9<\/td>\n1 Scope
2 Normative references
3 Terms and definitions <\/td>\n<\/tr>\n
11<\/td>\n4 Fundamentals
5 Devices and instruments
5.1 Schematic diagrams <\/td>\n<\/tr>\n
12<\/td>\n5.2 X-ray generator <\/td>\n<\/tr>\n
13<\/td>\n5.3 X-ray mirror
5.4 Monochromator
5.5 Sample attachment
5.6 Goniometer
5.7 Detector
5.8 Instrument calibration <\/td>\n<\/tr>\n
14<\/td>\n6 Preparation of sample
7 Test method and procedure
7.1 Optics alignment
7.2 Sample alignment <\/td>\n<\/tr>\n
15<\/td>\n7.3 Adjusting the initial position of goniometer
7.3.1 Symmetric diffraction <\/td>\n<\/tr>\n
17<\/td>\n7.3.2 Asymmetric diffraction
7.4 Microscopic position adjustment of goniometer (\u03a6 and \u03c7 axes) and \u03c9 scan
7.4.1 Symmetric diffraction <\/td>\n<\/tr>\n
20<\/td>\n7.4.2 Asymmetric diffraction <\/td>\n<\/tr>\n
24<\/td>\n7.5 Crystalline quality measurement method of single-crystal wafer
7.5.1 General
7.5.2 Selecting the flat zone position of wafer <\/td>\n<\/tr>\n
25<\/td>\n7.5.3 Arranging the fixed size of the square
7.5.4 Measuring the FWHM value of RC
7.5.5 Interference effect by the wafer’s curvature
7.5.6 Doped epitaxy film on a single-crystal thin film substrate <\/td>\n<\/tr>\n
26<\/td>\n8 Data analysis
9 Test report <\/td>\n<\/tr>\n
28<\/td>\nAnnex A (informative) Example of d-spacing, 2\u03b8, \u03c7 value (tilt angle) and relative ideal intensity of the symmetric and asymmetric diffraction on the SiC single-crystal thin film (wafer) <\/td>\n<\/tr>\n
30<\/td>\nAnnex B (informative) Determination of d-spacing, 2\u03b8, \u03c7 value (tilt angle) and relative ideal intensity for the symmetric and asymmetric diffraction on the single-crystal thin film (wafer) <\/td>\n<\/tr>\n
34<\/td>\nAnnex C (informative) Results of interlaboratory test <\/td>\n<\/tr>\n
36<\/td>\nBibliography <\/td>\n<\/tr>\n<\/table>\n","protected":false},"excerpt":{"rendered":"

Fine ceramics (advanced ceramics, advanced technical ceramics). Test method for crystalline quality of single-crystal thin film (wafer) using XRD method with parallel X-ray beam<\/b><\/p>\n\n\n\n\n
Published By<\/td>\nPublication Date<\/td>\nNumber of Pages<\/td>\n<\/tr>\n
BSI<\/b><\/a><\/td>\n2020<\/td>\n38<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n","protected":false},"featured_media":318703,"template":"","meta":{"rank_math_lock_modified_date":false,"ep_exclude_from_search":false},"product_cat":[1164,2641],"product_tag":[],"class_list":{"0":"post-318697","1":"product","2":"type-product","3":"status-publish","4":"has-post-thumbnail","6":"product_cat-81-060-30","7":"product_cat-bsi","9":"first","10":"instock","11":"sold-individually","12":"shipping-taxable","13":"purchasable","14":"product-type-simple"},"_links":{"self":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product\/318697","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product"}],"about":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/types\/product"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/media\/318703"}],"wp:attachment":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/media?parent=318697"}],"wp:term":[{"taxonomy":"product_cat","embeddable":true,"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product_cat?post=318697"},{"taxonomy":"product_tag","embeddable":true,"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product_tag?post=318697"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}