IEC 60747-14-4:2011 applies to semiconductor accelerometers for all types of products. This standard applies not only to typical semiconductor accelerometers with built-in electric circuits, but also to semiconductor accelerometers accompanied by external circuits. This standard does not (or should not) violate (or interfere with) the agreement between customers and suppliers in terms of a new model or parameters for business. NOTE 1: This standard, although directed toward semiconductor accelerometers, may be applied in whole or in part to any mass produced type of accelerometer. NOTE 2: The purpose of this standard is to allow for a systematic description, which covers the subjects initiated by the advent of semiconductor accelerometers. The tasks imposed on the semiconductor accelerometers are not only common to all accelerometers but also inherent to them and not yet totally solved. The descriptions are based on latest research results. One typical example is the multi-axis accelerometer. This standard states the method of measuring acceleration as a vector quantity using multi-axis accelerometers. NOTE 3: This standard does not conflict in any way with any existing parts of either ISO 16063 or ISO 5347. This standard intends to provide the concepts and the procedures of calibration of the semiconductor multi-axis accelerometers which are used not only for the measurement of acceleration but also for the control of motion in the wide frequencies ranging from DC. This publication is to be read in conjunction with \/2.<\/p>\n
| PDF Pages<\/th>\n | PDF Title<\/th>\n<\/tr>\n | ||||||
|---|---|---|---|---|---|---|---|
| 4<\/td>\n | English \n CONTENTS <\/td>\n<\/tr>\n | ||||||
| 7<\/td>\n | FOREWORD <\/td>\n<\/tr>\n | ||||||
| 9<\/td>\n | INTRODUCTION <\/td>\n<\/tr>\n | ||||||
| 10<\/td>\n | 1 Scope 2 Normative references <\/td>\n<\/tr>\n | ||||||
| 11<\/td>\n | 3 Terminology and letter symbols 3.1 Terms and definitions <\/td>\n<\/tr>\n | ||||||
| 17<\/td>\n | 3.2 Letter symbols Tables \n Table 1 \u2013 List of letter symbols <\/td>\n<\/tr>\n | ||||||
| 18<\/td>\n | 4 Essential ratings and characteristics 4.1 General <\/td>\n<\/tr>\n | ||||||
| 19<\/td>\n | Figures \n Figure 1 \u2013 Single axis accelerometer Figure 2 \u2013 Multi-axis accelerometer <\/td>\n<\/tr>\n | ||||||
| 20<\/td>\n | Figure 3 \u2013 Concept of the mathematical definition of accelerometers Table 2 \u2013 Level of accelerometers and the definition <\/td>\n<\/tr>\n | ||||||
| 22<\/td>\n | 4.2 Ratings (limiting values) 4.3 Recommended operating conditions <\/td>\n<\/tr>\n | ||||||
| 23<\/td>\n | 4.4 Characteristics <\/td>\n<\/tr>\n | ||||||
| 25<\/td>\n | 5 Measuring methods 5.1 General <\/td>\n<\/tr>\n | ||||||
| 26<\/td>\n | Table 3 \u2013 Test items and the recommended corresponding measurement methods <\/td>\n<\/tr>\n | ||||||
| 27<\/td>\n | 5.2 Testing methods for characteristics Table 4 \u2013 Relation between recommended applicable calibration methods and type of accelerometers <\/td>\n<\/tr>\n | ||||||
| 30<\/td>\n | Figure 4 \u2013 Concept of dynamic linearity of an accelerometer on gain <\/td>\n<\/tr>\n | ||||||
| 31<\/td>\n | Figure 5 \u2013 Concept of dynamic linearity of an accelerometer on phase <\/td>\n<\/tr>\n | ||||||
| 35<\/td>\n | Figure 6 \u2013 The semiconductor accelerometer as a system <\/td>\n<\/tr>\n | ||||||
| 36<\/td>\n | Figure 7 \u2013 Example of the structure of assembled semiconductor accelerometer s \nystem for the concept of accelerometer frequency response <\/td>\n<\/tr>\n | ||||||
| 37<\/td>\n | Figure 8 \u2013 Schematic diagram of frequency response measurement by electrical input <\/td>\n<\/tr>\n | ||||||
| 38<\/td>\n | 6 Acceptance and reliability 6.1 General 6.2 Environmental test <\/td>\n<\/tr>\n | ||||||
| 40<\/td>\n | 6.3 Reliability test <\/td>\n<\/tr>\n | ||||||
| 41<\/td>\n | Annex A (informative) \nDefinition of sensitivity matrix of an accelerometer <\/td>\n<\/tr>\n | ||||||
| 48<\/td>\n | Figure A.1 \u2013 Example of direction cosine Table A.1 \u2013 Symbols for the relationship between input acceleration and the output signal from an accelerometer using one-dimensional vibration table <\/td>\n<\/tr>\n | ||||||
| 49<\/td>\n | Table A.2 \u2013 Symbols for input acceleration and output signals from an accelerometer Table A.3 \u2013 Definition of symbols for describing the input acceleration, output signal from the target accelerometer and the direction cosine repeated three times <\/td>\n<\/tr>\n | ||||||
| 51<\/td>\n | Table A.4 \u2013 Relationship between the expression of transfer function in a matrix form and the number of axis of the target accelerometers <\/td>\n<\/tr>\n | ||||||
| 55<\/td>\n | Figure A.2 \u2013 Accelerometers or pick-offs assembled in a normal co-ordinate system (top figure) and the acceleration component projection to the three co-ordinate axis plains, XY, YZ and ZX (bottom figure) <\/td>\n<\/tr>\n | ||||||
| 59<\/td>\n | Table A.5 \u2013 Definition of vector space related to the generalization of the transverse sensitivity using the vector space concept <\/td>\n<\/tr>\n | ||||||
| 61<\/td>\n | Table A.6 \u2013 Relation between input acceleration and output signal for the calibration, using the six-dimensional vibration table <\/td>\n<\/tr>\n | ||||||
| 77<\/td>\n | Table A.7 \u2013 Normal sensitivities, explicit cross-sensitivities and implicit cross-sensitivities obtained by the calibration carried out in the application acceleration vector space with three dimensions <\/td>\n<\/tr>\n | ||||||
| 78<\/td>\n | Table A.8 \u2013 Normal sensitivities, explicit cross-sensitivities and implicit cross-sensitivities obtained by the calibration carried out in the application acceleration vector space with six dimensions <\/td>\n<\/tr>\n | ||||||
| 79<\/td>\n | Table A.9 \u2013 List of symbols in terms of measurement uncertainty using an accelerometer with M output axis assuming that N is larger than M <\/td>\n<\/tr>\n | ||||||
| 81<\/td>\n | Annex B (informative) \nDynamic linearity measurement using an impact acceleration generator Table B.1 \u2013 Dynamic linearity when both input and output are vector quantities <\/td>\n<\/tr>\n | ||||||
| 82<\/td>\n | Table B.2 \u2013 Relations between the direction cosine of the input acceleration to one-axis accelerometers and the signal from the output axis <\/td>\n<\/tr>\n | ||||||
| 83<\/td>\n | Table B.3 \u2013 Relationship between the direction cosine of the input acceleration to one-axis accelerometers and the signal from the output axis <\/td>\n<\/tr>\n | ||||||
| 84<\/td>\n | Table B.4 \u2013 Conditions on the direction cosine for dynamic linearity measurement Table B.5 \u2013 Relations between the direction cosine of the input acceleration to two-axis accelerometers and the signal from the output axis <\/td>\n<\/tr>\n | ||||||
| 85<\/td>\n | Table B.6 \u2013 Relations between the direction cosine of the input acceleration to two-axis accelerometers and the signal from the output axis Table B.7 \u2013 Conditions on the direction cosine for the dynamic linearity measurement <\/td>\n<\/tr>\n | ||||||
| 86<\/td>\n | Table B.8 \u2013 Relationship between the direction cosine of the input acceleration to three-axis accelerometers and the signal from the output axis <\/td>\n<\/tr>\n | ||||||
| 87<\/td>\n | Table B.9 \u2013 Relations between the direction cosine of the input acceleration to three-axis accelerometers and the signal from the output axis Table B.10 \u2013 Conditions on the direction cosine for dynamic linearity measurement <\/td>\n<\/tr>\n | ||||||
| 88<\/td>\n | Figure B.1 \u2013 Set-up for dynamic linearity measurement <\/td>\n<\/tr>\n | ||||||
| 90<\/td>\n | Annex C (informative) \nMeasurement of peak sensitivity Figure C.1 \u2013 Peak sensitivity as a function of each frequency bandwidth from DC to fn Table C.1 \u2013 Definition of elements in one-axis accelerometer peak sensitivity <\/td>\n<\/tr>\n | ||||||
| 91<\/td>\n | Table C.2 \u2013 Peak sensitivity of one-axis accelerometer Table C.3 \u2013 Relationship of direction cosine and the co-ordinate system of the target accelerometer <\/td>\n<\/tr>\n | ||||||
| 93<\/td>\n | Table C.4 \u2013 Definition of elements in two-axis accelerometer peak sensitivity <\/td>\n<\/tr>\n | ||||||
| 95<\/td>\n | Table C.5 \u2013 Definition of elements in three-axis accelerometer peak sensitivity <\/td>\n<\/tr>\n | ||||||
| 98<\/td>\n | Figure C.2 \u2013 Set-up for the control of frequency bandwidth of shock acceleration <\/td>\n<\/tr>\n | ||||||
| 99<\/td>\n | Bibliography <\/td>\n<\/tr>\n<\/table>\n","protected":false},"excerpt":{"rendered":" Semiconductor devices. Discrete devices – Semiconductor accelerometers<\/b><\/p>\n |